Effect of porosity on mechanical and fracture properties of Advanced PECVD Ultralow-k SiCOH films

Examensarbete för masterexamen

Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.12380/166082
Download file(s):
There are no files associated with this item.
Type: Examensarbete för masterexamen
Master Thesis
Title: Effect of porosity on mechanical and fracture properties of Advanced PECVD Ultralow-k SiCOH films
Authors: Wu, Chen
Keywords: Elektroteknik och elektronik;Materialvetenskap;Nanovetenskap och nanoteknik;Produktion;Electrical Engineering, Electronic Engineering, Information Engineering;Materials Science;Nanoscience & Nanotechnology;Production
Issue Date: 2012
Publisher: Chalmers tekniska högskola / Institutionen för mikroteknologi och nanovetenskap
Chalmers University of Technology / Department of Microtechnology and Nanoscience
URI: https://hdl.handle.net/20.500.12380/166082
Collection:Examensarbeten för masterexamen // Master Theses



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.