Photo-structuring of Organic Layers for Flexible Electronics

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Examensarbete för masterexamen
Master Thesis
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2013
Författare
SHANMUGAM, SANTHOSH
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Even though inorganic Thin Film Transistors are widely used in semiconductor industries at present, organic Thin Film Transistor (OTFT) is a fast developing technology that shows flexibility in production with ultra-low cost. In recent years, wide research are made with an aim to improve the performance of OTFTs. This master thesis project was carried-out to process and characterize a high-k organic polymer dielectric of dielectric constant >3, without any pin-holes or cracks thus realizing high breakdown voltage and to build circuitry structures on it. The lithography step for patterning the dielectric was done by photo-illumination at I-line (365nm). Achieved sharp and clear patterns, but the polymer dielectric suffered relatively high layer loss during developing due to poor cross-linking and adhesion. IR and UV/vis analysis were made and it was found that the polymer dielectric was absorbing at shorter wavelength; thus device structures were fabricated at a UV wavelength of 254 nm. This project also involved laser patterning of active p-type polymer organic semiconductor (OSC) around the TFTs contact pads to avoid cross-talk between the transistors via the active material. Nd:YAG, high-intensity multiple short pulsed UV laser of wavelength 355 nm with ~15 ns pulse duration at 10 kHz was used to pattern the devices. SAM (Self-assembled monolayer) treatments were also done on the SiO2 dielectric surface to modify the morphology of dielectric-OSC interface and laser writing of the active material was performed and compared for different SAMs. Minimized off-state current and reduced gate leakage was realized with laser patterning.
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Ämne/nyckelord
Elektronik, Övrig elektroteknik, elektronik och fotonik, Nanoteknik, Materialvetenskap, Nanovetenskap och nanoteknik, Produktion, Electronics, Other electrical engineering, electronics and photonics, Nano Technology, Materials Science, Nanoscience & Nanotechnology, Production
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