Low temperature plasma-activated hydrophobic wafer bonding
dc.contributor.author | Nunes, Rohan | |
dc.date.accessioned | 2021-03-25T11:50:11Z | |
dc.date.available | 2021-03-25T11:50:11Z | |
dc.date.issued | 2003 | sv |
dc.identifier.uri | https://hdl.handle.net/20.500.12380/302281 | |
dc.language.iso | eng | sv |
dc.setspec.uppsok | Technology | |
dc.title | Low temperature plasma-activated hydrophobic wafer bonding | sv |
dc.type.degree | Examensarbete för masterexamen | sv |
dc.type.uppsok | H |
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