Rattlesnake nanoactuator - a precision high speed closed loop linear actuator with capacitive sensor
| dc.contributor.author | Lock, Jonathan | |
| dc.contributor.department | Chalmers tekniska högskola / Institutionen för mikroteknologi och nanovetenskap | sv |
| dc.contributor.department | Chalmers University of Technology / Department of Microtechnology and Nanoscience | en |
| dc.date.accessioned | 2019-07-03T12:43:00Z | |
| dc.date.available | 2019-07-03T12:43:00Z | |
| dc.date.issued | 2011 | |
| dc.description.abstract | This thesis describes the development of a novel linear actuator based on a closed loop tightly integrated magnetic motor and capacitive sensor. Mechanical, electrical and software work has resulted in a device achieving a mechanical range of travel of ±1mm with a steady state RMS error of 62nm at a closed loop bandwidth of 3.5kHz, a typical tracking error of hundreds of nanometers (dependent on the waveform shape) and a maximum error in the range of 1 − 10μm. The stiffness of the system at 10Hz is 4N/μm and the actuator has a useful range of motion up to 300 − 500Hz with reduced travel at these speeds due to force limitations. This is possibly an area of continued work; minor modifications could lead to an RMS error of ≈ 20nm, making it possible to outperform piezoelectric actuators in some applications such as adaptive optics or interferometry. | |
| dc.identifier.uri | https://hdl.handle.net/20.500.12380/148429 | |
| dc.language.iso | eng | |
| dc.setspec.uppsok | PhysicsChemistryMaths | |
| dc.subject | Informations- och kommunikationsteknik | |
| dc.subject | Elektroteknik och elektronik | |
| dc.subject | Information & Communication Technology | |
| dc.subject | Electrical Engineering, Electronic Engineering, Information Engineering | |
| dc.title | Rattlesnake nanoactuator - a precision high speed closed loop linear actuator with capacitive sensor | |
| dc.type.degree | Examensarbete för masterexamen | sv |
| dc.type.degree | Master Thesis | en |
| dc.type.uppsok | H |
Ladda ner
Original bundle
1 - 1 av 1
Hämtar...
- Namn:
- 148429.pdf
- Storlek:
- 10.36 MB
- Format:
- Adobe Portable Document Format
- Beskrivning:
- Fulltext