Straight silicon tube for density and mass flow sensing (fabrication, modeling and evaluation)
dc.contributor.author | Najmzadeh, Mohammad | |
dc.contributor.author | Haasl, Sjoerd | |
dc.contributor.author | Enoksson, Peter | |
dc.contributor.department | Chalmers tekniska högskola / Extern | sv |
dc.contributor.department | Chalmers University of Technology / External | en |
dc.date.accessioned | 2019-07-03T12:05:46Z | |
dc.date.available | 2019-07-03T12:05:46Z | |
dc.date.issued | 2007 | |
dc.description.abstract | The aim of this project work is to fabricate and evaluate a resonating silicon tube as a density and a Coriolis mass flow sensor. This project consists of three course works: a project work, a microelectronics project, and a master thesis. At first, the licenses needed to work with the clean room facilities were obtained. Several process steps were optimized/calibrated and finally, the first prototypes were fabricated. The fixtures and the electrodes were prepared. A quantitative model for the density/Coriolis mass flow sensor was derived. Several parameters like density sensitivity, pull-in-voltage, Q-factor, resonance frequency, burst pressure, the amplitude of Coriolis effect were investigated/formulated/calculated. An electrical-optical setup was prepared to evaluate the tube as a density sensor. The first three vibration modes were calibrated and the important parameters of a densitometer, quality factor and fluid density sensitivity, were measured. Several sources of loss were investigated. The effect of viscosity and flow were investigated and finally, the results were published in a journal paper and two conference papers. An optical-electrical setup was designed and implemented to detect the Coriolis effect using geometrical optics and MATLAB calculations. Detecting this effect and evaluating the mass flow sensor are the next steps. | |
dc.identifier.uri | https://hdl.handle.net/20.500.12380/61575 | |
dc.language.iso | eng | |
dc.setspec.uppsok | Technology | |
dc.subject | Elektroteknik och elektronik | |
dc.subject | Produktion | |
dc.subject | Transport | |
dc.subject | Electrical Engineering, Electronic Engineering, Information Engineering | |
dc.subject | Production | |
dc.subject | Transport | |
dc.title | Straight silicon tube for density and mass flow sensing (fabrication, modeling and evaluation) | |
dc.type.degree | Examensarbete för masterexamen | sv |
dc.type.degree | Master Thesis | en |
dc.type.uppsok | H |