Rattlesnake nanoactuator - a precision high speed closed loop linear actuator with capacitive sensor

Examensarbete för masterexamen

Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.12380/148429
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Type: Examensarbete för masterexamen
Master Thesis
Title: Rattlesnake nanoactuator - a precision high speed closed loop linear actuator with capacitive sensor
Authors: Lock, Jonathan
Abstract: This thesis describes the development of a novel linear actuator based on a closed loop tightly integrated magnetic motor and capacitive sensor. Mechanical, electrical and software work has resulted in a device achieving a mechanical range of travel of ±1mm with a steady state RMS error of 62nm at a closed loop bandwidth of 3.5kHz, a typical tracking error of hundreds of nanometers (dependent on the waveform shape) and a maximum error in the range of 1 − 10μm. The stiffness of the system at 10Hz is 4N/μm and the actuator has a useful range of motion up to 300 − 500Hz with reduced travel at these speeds due to force limitations. This is possibly an area of continued work; minor modifications could lead to an RMS error of ≈ 20nm, making it possible to outperform piezoelectric actuators in some applications such as adaptive optics or interferometry.
Keywords: Informations- och kommunikationsteknik;Elektroteknik och elektronik;Information & Communication Technology;Electrical Engineering, Electronic Engineering, Information Engineering
Issue Date: 2011
Publisher: Chalmers tekniska högskola / Institutionen för mikroteknologi och nanovetenskap
Chalmers University of Technology / Department of Microtechnology and Nanoscience
URI: https://hdl.handle.net/20.500.12380/148429
Collection:Examensarbeten för masterexamen // Master Theses



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