Straight silicon tube for density and mass flow sensing (fabrication, modeling and evaluation)
Examensarbete för masterexamen
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|Type: ||Examensarbete för masterexamen|
|Title: ||Straight silicon tube for density and mass flow sensing (fabrication, modeling and evaluation)|
|Authors: ||Najmzadeh, Mohammad|
|Abstract: ||The aim of this project work is to fabricate and evaluate a resonating silicon tube as a density and a Coriolis mass flow sensor. This project consists of three course works: a project work, a microelectronics project, and a master thesis. At first, the licenses needed to work with the clean room facilities were obtained. Several process steps were optimized/calibrated and finally, the first prototypes were fabricated. The fixtures and the electrodes were prepared. A quantitative model for the density/Coriolis mass flow sensor was derived. Several parameters like density sensitivity, pull-in-voltage, Q-factor, resonance frequency, burst pressure, the amplitude of Coriolis effect were investigated/formulated/calculated. An electrical-optical setup was prepared to evaluate the tube as a density sensor. The first three vibration modes were calibrated and the important parameters of a densitometer, quality factor and fluid density sensitivity, were measured. Several sources of loss were investigated. The effect of viscosity and flow were investigated and finally, the results were published in a journal paper and two conference papers. An optical-electrical setup was designed and implemented to detect the Coriolis effect using geometrical optics and MATLAB calculations. Detecting this effect and evaluating the mass flow sensor are the next steps.|
|Keywords: ||Elektroteknik och elektronik;Produktion;Transport;Electrical Engineering, Electronic Engineering, Information Engineering;Production;Transport|
|Issue Date: ||2007|
|Publisher: ||Chalmers tekniska högskola / Extern|
Chalmers University of Technology / External
|Collection:||Examensarbeten för masterexamen // Master Theses|
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