Effect of porosity on mechanical and fracture properties of Advanced PECVD Ultralow-k SiCOH films
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Date
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Examensarbete för masterexamen
Master Thesis
Master Thesis
Programme
Model builders
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Description
Keywords
Elektroteknik och elektronik, Materialvetenskap, Nanovetenskap och nanoteknik, Produktion, Electrical Engineering, Electronic Engineering, Information Engineering, Materials Science, Nanoscience & Nanotechnology, Production
